Preparation and characterization of amorphous SiCN films

In this project, a DC magnetron sputtering system with RF bias and a plasma enhanced electron cyclotron resonance chemical vapor deposition techniques have been successfully used to deposit a-SiCN films.

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Bibliographic Details
Main Author:	Gao, Ying.
Other Authors:	Zhang, Dao Hua
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
Online Access:	http://hdl.handle.net/10356/4277
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4277
record_format	dspace
spelling	sg-ntu-dr.10356-42772023-07-04T15:20:33Z Preparation and characterization of amorphous SiCN films Gao, Ying. Zhang, Dao Hua School of Electrical and Electronic Engineering Wei, Jun DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials In this project, a DC magnetron sputtering system with RF bias and a plasma enhanced electron cyclotron resonance chemical vapor deposition techniques have been successfully used to deposit a-SiCN films. Master of Engineering 2008-09-17T09:48:11Z 2008-09-17T09:48:11Z 2001 2001 Thesis http://hdl.handle.net/10356/4277 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electric apparatus and materials Gao, Ying. Preparation and characterization of amorphous SiCN films
description	In this project, a DC magnetron sputtering system with RF bias and a plasma enhanced electron cyclotron resonance chemical vapor deposition techniques have been successfully used to deposit a-SiCN films.
author2	Zhang, Dao Hua
author_facet	Zhang, Dao Hua Gao, Ying.
format	Theses and Dissertations
author	Gao, Ying.
author_sort	Gao, Ying.
title	Preparation and characterization of amorphous SiCN films
title_short	Preparation and characterization of amorphous SiCN films
title_full	Preparation and characterization of amorphous SiCN films
title_fullStr	Preparation and characterization of amorphous SiCN films
title_full_unstemmed	Preparation and characterization of amorphous SiCN films
title_sort	preparation and characterization of amorphous sicn films
publishDate	2008
url	http://hdl.handle.net/10356/4277
_version_	1772827037802692608

Preparation and characterization of amorphous SiCN films

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