Properties of amorphous Si-carbon alloy film deposited by FCVA technique

• Main Author: Tan, Wee Ming
• Other Authors: Tay, Beng Kang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/3399
• Institution: Nanyang Technological University

Amorphous silicon-carbon alloy (a-Sii-xCx) has attracted much attention not only due to the composition dependent variability of their optical band gap but also because of their important roles as intermediate layer for the growth of diamond film on crystalline silicon and non-diamond substrates. [1...