A study of semiconductor nanostructures formed by surface modification
Semiconductor nanostructures formed by a surface modification process caused by ion sputtering is studied in this thesis. The microscopic dynamics of the semiconductor surface undergoing ion impingement is discussed in detail. Due to the promising controllability and minimal damage creation on the s...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2011
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| Online Access: | https://hdl.handle.net/10356/43568 |
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| Institution: | Nanyang Technological University |
| Language: | English |