A study of semiconductor nanostructures formed by surface modification

Semiconductor nanostructures formed by a surface modification process caused by ion sputtering is studied in this thesis. The microscopic dynamics of the semiconductor surface undergoing ion impingement is discussed in detail. Due to the promising controllability and minimal damage creation on the s...

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主要作者: Wang, Yang
其他作者: Yoon Soon Fatt
格式: Theses and Dissertations
語言:English
出版: 2011
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在線閱讀:https://hdl.handle.net/10356/43568
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機構: Nanyang Technological University
語言: English