Study and analysis of thin film contact behaviours in micro/nano devices

• 主要作者: Huang, Zhongwei.
• 其他作者: Wang Hong
• 格式: Final Year Project
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• 在線閱讀: http://hdl.handle.net/10356/45920

Today’s nano scale technologies in wireless communication, microwave communication and other high value applications depend on RF MEMS technology to solve many intriguing problems. The competitive and inspiring developments of miniaturized communication devices strained the market to acquire efficie...