Study and analysis of thin film contact behaviours in micro/nano devices

• Main Author: Huang, Zhongwei.
• Other Authors: Wang Hong
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/45920
• Institution: Nanyang Technological University

Today’s nano scale technologies in wireless communication, microwave communication and other high value applications depend on RF MEMS technology to solve many intriguing problems. The competitive and inspiring developments of miniaturized communication devices strained the market to acquire efficie...