Optimization process of disk resonator

• المؤلف الرئيسي: Suryanata, Lukas Hari.
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2010
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/40495

For a microelectromechanical system (MEMS) device such as disk resonator, its design must be optimized before it is fabricated. This report presents part of optimization process of disk resonator using a FEA solver, COMSOL Multiphysics. In the beginning, how MEMS device, particularly disk resonator,...