Optimization process of disk resonator

• Main Author: Suryanata, Lukas Hari.
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Final Year Project
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/40495
• Institution: Nanyang Technological University

For a microelectromechanical system (MEMS) device such as disk resonator, its design must be optimized before it is fabricated. This report presents part of optimization process of disk resonator using a FEA solver, COMSOL Multiphysics. In the beginning, how MEMS device, particularly disk resonator,...