A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application

A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application

In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction...

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Main Author: Tan, Chee Wee
Other Authors: Miao Jianmin
Format: Theses and Dissertations
Language:English
Published: 2011
Subjects:
DRNTU::Engineering::Mechanical engineering
Online Access:https://hdl.handle.net/10356/46232
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-462322023-03-11T17:39:55Z A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application Tan, Chee Wee Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed. DOCTOR OF PHILOSOPHY (MAE) 2011-07-08T03:10:51Z 2011-07-08T03:10:51Z 2011 2011 Thesis Tan, C. W. (2011). A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/46232 10.32657/10356/46232 en 184 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Tan, Chee Wee
A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
description In the analysis and design of microelectromechanical system (MEMS) devices, volume and surface forces are two physical quantities that are commonly encountered. During miniaturization, equal reduction of both the volume and the surface of a microstructure is not normally achievable. A 10% reduction in length results in the surface area. Therefore, the surface force effect of viscous damping has a more significant influence on the mechanical performance of MEMS devices such as frequency response characteristics, mechanical- thermal noise and switching speed.
author2 Miao Jianmin
author_facet Miao Jianmin
Tan, Chee Wee
format Theses and Dissertations
author Tan, Chee Wee
author_sort Tan, Chee Wee
title A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
title_short A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
title_full A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
title_fullStr A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
title_full_unstemmed A theoretical and experimental study of the viscous damping effect for diaphragm-based MEMS application
title_sort theoretical and experimental study of the viscous damping effect for diaphragm-based mems application
publishDate 2011
url https://hdl.handle.net/10356/46232
_version_ 1761781932585123840

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