Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices

58 p.

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Bibliographic Details
Main Author:	Prasad Krishnamachar.
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2011
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/46592
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-465922023-03-04T03:22:12Z Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices Prasad Krishnamachar. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering 58 p. In this project report, we have outlined the details of a successful development of photolithography processes for the fabrication of GaAs based devices. The processes require the need for reliable and repeatable way, in which the design patterns are transferred from the mask plate onto the semiconductor wafer. Typical devices fabricated in our laboratory, using this lithography process, include GaAs metal-semiconductor field effect transistors (MESFETs), high electron mobility transistors (HEMTs), and heterojunction bipolar transistors (HBTs). RP 22/92 2011-12-21T03:05:22Z 2011-12-21T03:05:22Z 1998 1998 Research Report http://hdl.handle.net/10356/46592 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Prasad Krishnamachar. Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
description	58 p.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Prasad Krishnamachar.
format	Research Report
author	Prasad Krishnamachar.
author_sort	Prasad Krishnamachar.
title	Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
title_short	Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
title_full	Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
title_fullStr	Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
title_full_unstemmed	Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices
title_sort	development of photolithography for the fabrication of novel gaas based devices and diamond-like film based devices
publishDate	2011
url	http://hdl.handle.net/10356/46592
_version_	1759855488502071296

Development of photolithography for the fabrication of novel GaAs based devices and diamond-like film based devices

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