Investigation of nano-porous silicon fabricated by electrochemical etching

72 p.

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Bibliographic Details
Main Author:	Ong, June Lay Ting
Other Authors:	Tay Beng Kang
Format:	Theses and Dissertations
Published:	2011
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/46890
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-468902023-07-04T16:26:48Z Investigation of nano-porous silicon fabricated by electrochemical etching Ong, June Lay Ting Tay Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering 72 p. Porous silicon is quickly becoming an increasingly important and versatile electronic material in today's fabrication technology. Nowadays, because of its high reactivity due to its large surface area of the pores, porous silicon has been demonstrated as a useful sacrificial layer in surface micro machining. It's unique morphology made it an attractive material for the fabrication of the chemical sensing microstructures. It is also being use as planar emitters for efficient emission of electrons. In addition, porous silicon serves as a good substrate material for both the carbon nanotube material for the enhancement of the field emission property. Master of Science (Microelectronics) 2011-12-27T05:42:19Z 2011-12-27T05:42:19Z 2011 Thesis http://hdl.handle.net/10356/46890 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Ong, June Lay Ting Investigation of nano-porous silicon fabricated by electrochemical etching
description	72 p.
author2	Tay Beng Kang
author_facet	Tay Beng Kang Ong, June Lay Ting
format	Theses and Dissertations
author	Ong, June Lay Ting
author_sort	Ong, June Lay Ting
title	Investigation of nano-porous silicon fabricated by electrochemical etching
title_short	Investigation of nano-porous silicon fabricated by electrochemical etching
title_full	Investigation of nano-porous silicon fabricated by electrochemical etching
title_fullStr	Investigation of nano-porous silicon fabricated by electrochemical etching
title_full_unstemmed	Investigation of nano-porous silicon fabricated by electrochemical etching
title_sort	investigation of nano-porous silicon fabricated by electrochemical etching
publishDate	2011
url	http://hdl.handle.net/10356/46890
_version_	1772827118505295872

Investigation of nano-porous silicon fabricated by electrochemical etching

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