Study of friction behavior of micromachined sidewall surfaces of MEMS devices
196 p.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2011
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/47173 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| id |
sg-ntu-dr.10356-47173 |
|---|---|
| record_format |
dspace |
| spelling |
sg-ntu-dr.10356-471732023-03-11T17:49:41Z Study of friction behavior of micromachined sidewall surfaces of MEMS devices Wu, Jie Miao Jianmin Wang Shao School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering 196 p. Devices on a micrometer scale integrated with mechanical elements, sensors, actua-tors, and electronics on a common silicon substrate have been developed in the recent decades owing to the advancement of the technology of micro-electro-mechanical sys-tems (MEMS). However, MEMS devices with sliding contact such as stepper motors, gas bearings, micro-motors and associated components of microengines, are still lim-ited to laboratory studies. The occurrence of failure of rubbing interfaces affects the performance and reliability of these MEMS devices, leading to major obstacles to com-mercialization. The friction behavior of MEMS devices in the contact regime has not been well understood so far although it is closely related a dominant failure mecha-nism. Well developed theories and models for friction measurement at macro-scale might not be directly applied to micro-scale measurements due to the scaling effects. For lightly loaded surfaces with small roughnesses, contact phenomena occur at micro-or even nano-scales and, thus, the inter-molecular forces may play an important role in determining the asperity contact, rendering some conventional theories about friction, such as Amontons' law, unsuitable. Therefore, specially designed MEMS devices for friction measurements on micro-scale are necessary. DOCTOR OF PHILOSOPHY (MAE) 2011-12-27T06:31:33Z 2011-12-27T06:31:33Z 2009 2009 Thesis Wu, J. (2009). Study of friction behavior of micromachined sidewall surfaces of MEMS devices. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/47173 10.32657/10356/47173 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Mechanical engineering |
| spellingShingle |
DRNTU::Engineering::Mechanical engineering Wu, Jie Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| description |
196 p. |
| author2 |
Miao Jianmin |
| author_facet |
Miao Jianmin Wu, Jie |
| format |
Theses and Dissertations |
| author |
Wu, Jie |
| author_sort |
Wu, Jie |
| title |
Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| title_short |
Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| title_full |
Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| title_fullStr |
Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| title_full_unstemmed |
Study of friction behavior of micromachined sidewall surfaces of MEMS devices |
| title_sort |
study of friction behavior of micromachined sidewall surfaces of mems devices |
| publishDate |
2011 |
| url |
https://hdl.handle.net/10356/47173 |
| _version_ |
1761781323493539840 |