Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method

Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method

10.1109/JMEMS.2011.2159094

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Bibliographic Details
Main Authors: Yu, H., Zhou, G., Sinha, S.K., Leong, J.Y., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Adhesion force
coefficient of friction
microtribometer
position-sensitive device (PSD)
rotational grating
sidewall friction
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59688
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/59688

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