Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method
10.1109/JMEMS.2011.2159094
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2014
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sg-nus-scholar.10635-596882024-11-12T22:19:03Z Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method Yu, H. Zhou, G. Sinha, S.K. Leong, J.Y. Chau, F.S. MECHANICAL ENGINEERING Adhesion force coefficient of friction microtribometer position-sensitive device (PSD) rotational grating sidewall friction 10.1109/JMEMS.2011.2159094 Journal of Microelectromechanical Systems 20 4 991-1000 JMIYE 2014-06-17T06:14:25Z 2014-06-17T06:14:25Z 2011-08 Article Yu, H., Zhou, G., Sinha, S.K., Leong, J.Y., Chau, F.S. (2011-08). Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method. Journal of Microelectromechanical Systems 20 (4) : 991-1000. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2011.2159094 10577157 http://scholarbank.nus.edu.sg/handle/10635/59688 000293751100025 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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ScholarBank@NUS |
| topic |
Adhesion force coefficient of friction microtribometer position-sensitive device (PSD) rotational grating sidewall friction |
| spellingShingle |
Adhesion force coefficient of friction microtribometer position-sensitive device (PSD) rotational grating sidewall friction Yu, H. Zhou, G. Sinha, S.K. Leong, J.Y. Chau, F.S. Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| description |
10.1109/JMEMS.2011.2159094 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Yu, H. Zhou, G. Sinha, S.K. Leong, J.Y. Chau, F.S. |
| format |
Article |
| author |
Yu, H. Zhou, G. Sinha, S.K. Leong, J.Y. Chau, F.S. |
| author_sort |
Yu, H. |
| title |
Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| title_short |
Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| title_full |
Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| title_fullStr |
Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| title_full_unstemmed |
Characterization and reduction of MEMS sidewall friction using novel microtribometer and localized lubrication method |
| title_sort |
characterization and reduction of mems sidewall friction using novel microtribometer and localized lubrication method |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/59688 |
| _version_ |
1821209523320258560 |