Design and fabrication of micro-hotplate for integrated gas sensors
This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4812 |
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| Institution: | Nanyang Technological University |
| Summary: | This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications. |
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