Design and fabrication of micro-hotplate for integrated gas sensors
This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications.
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| Format: | Theses and Dissertations |
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2008
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| Online Access: | http://hdl.handle.net/10356/4812 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-48122023-07-04T15:45:34Z Design and fabrication of micro-hotplate for integrated gas sensors Low, Huei Ming. Tse, Man Siu School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications. Master of Engineering 2008-09-17T09:59:12Z 2008-09-17T09:59:12Z 2001 2001 Thesis http://hdl.handle.net/10356/4812 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
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DR-NTU |
| topic |
DRNTU::Engineering::Electrical and electronic engineering |
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DRNTU::Engineering::Electrical and electronic engineering Low, Huei Ming. Design and fabrication of micro-hotplate for integrated gas sensors |
| description |
This thesis reports the successful development on the design and fabrication of simple low-power micromachined microhotplates suitable for integrated semiconductor oxide gas sensor applications. |
| author2 |
Tse, Man Siu |
| author_facet |
Tse, Man Siu Low, Huei Ming. |
| format |
Theses and Dissertations |
| author |
Low, Huei Ming. |
| author_sort |
Low, Huei Ming. |
| title |
Design and fabrication of micro-hotplate for integrated gas sensors |
| title_short |
Design and fabrication of micro-hotplate for integrated gas sensors |
| title_full |
Design and fabrication of micro-hotplate for integrated gas sensors |
| title_fullStr |
Design and fabrication of micro-hotplate for integrated gas sensors |
| title_full_unstemmed |
Design and fabrication of micro-hotplate for integrated gas sensors |
| title_sort |
design and fabrication of micro-hotplate for integrated gas sensors |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/4812 |
| _version_ |
1772828088578605056 |