Intelligent supervisory control for microelectronics fabrication

• Main Author: Ling, Sze Ling.
• Other Authors: Ling Keck Voon
• Format: Final Year Project
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• Online Access: http://hdl.handle.net/10356/50165
• Institution: Nanyang Technological University

In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the wafer is an issue of the process.