Intelligent supervisory control for microelectronics fabrication
In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the waf...
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sg-ntu-dr.10356-501652023-07-07T16:54:23Z Intelligent supervisory control for microelectronics fabrication Ling, Sze Ling. Ling Keck Voon School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the wafer is an issue of the process. Bachelor of Engineering 2012-05-30T07:16:07Z 2012-05-30T07:16:07Z 2012 2012 Final Year Project (FYP) http://hdl.handle.net/10356/50165 en Nanyang Technological University 52 p. application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| language |
English |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering Ling, Sze Ling. Intelligent supervisory control for microelectronics fabrication |
| description |
In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the wafer is an issue of the process. |
| author2 |
Ling Keck Voon |
| author_facet |
Ling Keck Voon Ling, Sze Ling. |
| format |
Final Year Project |
| author |
Ling, Sze Ling. |
| author_sort |
Ling, Sze Ling. |
| title |
Intelligent supervisory control for microelectronics fabrication |
| title_short |
Intelligent supervisory control for microelectronics fabrication |
| title_full |
Intelligent supervisory control for microelectronics fabrication |
| title_fullStr |
Intelligent supervisory control for microelectronics fabrication |
| title_full_unstemmed |
Intelligent supervisory control for microelectronics fabrication |
| title_sort |
intelligent supervisory control for microelectronics fabrication |
| publishDate |
2012 |
| url |
http://hdl.handle.net/10356/50165 |
| _version_ |
1772827429724749824 |