Nanometric material removal using electrokinetic phenomenon

• المؤلف الرئيسي: Leo, Cheng Seng
• مؤلفون آخرون: Yang Chun, Charles
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Manufacturing
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/50630
• المؤسسة: Nanyang Technological University

Material removal at the sub-micron level has been a topic of interest in the past few years, particularly with respect to the fabrication of miniaturized devices. While numerous techniques have been developed and refined from their larger meso-scale counterparts (e.g. polishing), most have inherent...