Nanometric material removal using electrokinetic phenomenon

• Main Author: Leo, Cheng Seng
• Other Authors: Yang Chun, Charles
• Format: Theses and Dissertations
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Manufacturing
• Online Access: https://hdl.handle.net/10356/50630
• Institution: Nanyang Technological University

Material removal at the sub-micron level has been a topic of interest in the past few years, particularly with respect to the fabrication of miniaturized devices. While numerous techniques have been developed and refined from their larger meso-scale counterparts (e.g. polishing), most have inherent...