Final report on industrial attachment with Renewable Energy Corporation Pte Ltd

Inline sheet resistance (SHR) measuring tool is ideally plugged in the unloading section of the diffusion furnace in order to show systematic drifts and give immediate feedback on dramatic process changes. However, there is an uncertainty in the accuracy of the inline tool. First half of the report...

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Bibliographic Details
Main Author: Ye, Peiru.
Other Authors: School of Materials Science & Engineering
Format: Industrial Attachment (IA)
Language:English
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/10356/50837
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Institution: Nanyang Technological University
Language: English
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