Novel design and fabrication of MIM capacitors with alternating connection fingers

• المؤلف الرئيسي: Seah, Yong Meng.
• مؤلفون آخرون: Wang Hong
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/51026

In this dissertation project, a series of novel MIM capacitors are designed. A novel process, compatible with GaAs MMICs is developed as well which allows the integration of passive devices and HEMT devices. Detailed description of the full design layout and fabrication process is presented in this...