Novel design and fabrication of MIM capacitors with alternating connection fingers

• Main Author: Seah, Yong Meng.
• Other Authors: Wang Hong
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/51026
• Institution: Nanyang Technological University

In this dissertation project, a series of novel MIM capacitors are designed. A novel process, compatible with GaAs MMICs is developed as well which allows the integration of passive devices and HEMT devices. Detailed description of the full design layout and fabrication process is presented in this...