Dielectric behavior and thermal stability of synthetic diamond

• Main Author: Ye, Haitao.
• Other Authors: Hing, Peter
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/5136
• Institution: Nanyang Technological University

The main objectives are to study the effect of some processing parameters on the synthesis of diamond films on silicon and other substrates.