Effects of diamond-like carbon and other dielectric layers on EPCOS SAW devices and structured wafers

• Main Authors: Yoon, Soon Fatt, Zhang, Qing, Ahn, Jaeshin, Zhou, Qiang, Tian, Jingze
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/14165
• Institution: Nanyang Technological University

Diamond-like carbon (DLC) films were deposited on Y-X quartz, Y-Z LiNbO3 and 42orot.Y-X LiTaO3 substrates through incorporation of a few nanometers’ thick SiC interlayer using plasma enhanced CVD (PECVD) technique. The “D” and “G” peaks of Raman scattering spectra were located at 1360-1376 and 15...