Characterization of amorphous silicon carbide thin films for display applications

• Main Authors: Ahn, Jaeshin, Yoon, Soon Fatt
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/2817
• Institution: Nanyang Technological University

The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application.