Characterization of amorphous silicon carbide thin films for display applications

The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application.

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Bibliographic Details
Main Authors:	Ahn, Jaeshin, Yoon, Soon Fatt
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/2817
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2817
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spelling	sg-ntu-dr.10356-28172023-03-04T03:22:10Z Characterization of amorphous silicon carbide thin films for display applications Ahn, Jaeshin Yoon, Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application. RG 23/96 2008-09-17T09:15:10Z 2008-09-17T09:15:10Z 2002 2002 Research Report http://hdl.handle.net/10356/2817 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Ahn, Jaeshin Yoon, Soon Fatt Characterization of amorphous silicon carbide thin films for display applications
description	The aim of this project is to investigate amorphous silicon carbide produced by the ECR system with the application in mind to the future flat panel display application.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Ahn, Jaeshin Yoon, Soon Fatt
format	Research Report
author	Ahn, Jaeshin Yoon, Soon Fatt
author_sort	Ahn, Jaeshin
title	Characterization of amorphous silicon carbide thin films for display applications
title_short	Characterization of amorphous silicon carbide thin films for display applications
title_full	Characterization of amorphous silicon carbide thin films for display applications
title_fullStr	Characterization of amorphous silicon carbide thin films for display applications
title_full_unstemmed	Characterization of amorphous silicon carbide thin films for display applications
title_sort	characterization of amorphous silicon carbide thin films for display applications
publishDate	2008
url	http://hdl.handle.net/10356/2817
_version_	1759855395153641472

Characterization of amorphous silicon carbide thin films for display applications

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