Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.

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Bibliographic Details
Main Authors: Swaminathan, S., Yoon, Soon Fatt., Zhu, Weiguang.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/2732
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Institution: Nanyang Technological University