Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

• Main Authors: Swaminathan, S., Yoon, Soon Fatt., Zhu, Weiguang.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/2732
• Institution: Nanyang Technological University

Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.