Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.

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Bibliographic Details
Main Authors:	Swaminathan, S., Yoon, Soon Fatt., Zhu, Weiguang.
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/2732
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Institution:	Nanyang Technological University

Description
Summary:	Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.