Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.

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Bibliographic Details
Main Authors:	Swaminathan, S., Yoon, Soon Fatt., Zhu, Weiguang.
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	http://hdl.handle.net/10356/2732
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2732
record_format	dspace
spelling	sg-ntu-dr.10356-27322023-03-04T03:20:45Z Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates Swaminathan, S. Yoon, Soon Fatt. Zhu, Weiguang. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied. RP 56/91 2008-09-17T09:13:57Z 2008-09-17T09:13:57Z 2000 2000 Research Report http://hdl.handle.net/10356/2732 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Swaminathan, S. Yoon, Soon Fatt. Zhu, Weiguang. Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
description	Using existing double axis resolution x-ray diffractometer, the grazing incidence reflectivity is studied.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Swaminathan, S. Yoon, Soon Fatt. Zhu, Weiguang.
format	Research Report
author	Swaminathan, S. Yoon, Soon Fatt. Zhu, Weiguang.
author_sort	Swaminathan, S.
title	Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
title_short	Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
title_full	Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
title_fullStr	Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
title_full_unstemmed	Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates
title_sort	grazing incidence x-ray reflectometry for characterization of extremely thin films grown on substrates
publishDate	2008
url	http://hdl.handle.net/10356/2732
_version_	1759854332609560576

Grazing incidence X-Ray reflectometry for characterization of extremely thin films grown on substrates

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