Growth and characterization of amorphous Si based multilayer structures
Silicon is a widely available material with very good electrical, thermal and mechanical properties suitable for the manufacture of electronic devices and has contributed to the big success of microelectronics. The trend in Si microelectronics towards faster and smaller devices has resulted in many...
Saved in:
主要作者: | |
---|---|
其他作者: | |
格式: | Theses and Dissertations |
語言: | English |
出版: |
2013
|
主題: | |
在線閱讀: | https://hdl.handle.net/10356/52043 |
標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|