Growth and characterization of amorphous Si based multilayer structures

• Main Author: Kamyab, Lobna
• Other Authors: Yu Mingbin
• Format: Theses and Dissertations
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics; DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics; DRNTU::Engineering::Materials::Photonics and optoelectronics materials; DRNTU::Engineering::Materials::Material testing and characterization
• Online Access: https://hdl.handle.net/10356/52043
• Institution: Nanyang Technological University

Silicon is a widely available material with very good electrical, thermal and mechanical properties suitable for the manufacture of electronic devices and has contributed to the big success of microelectronics. The trend in Si microelectronics towards faster and smaller devices has resulted in many...