Silicon incorporated amorphous carbon films for BioMEMS application

• المؤلف الرئيسي: Ong, Soon Eng
• مؤلفون آخرون: Sam Zhang Shanyong
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Biomaterials
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/5286
• المؤسسة: Nanyang Technological University

Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific com...