Silicon incorporated amorphous carbon films for BioMEMS application
Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific com...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/5286 |
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| Institution: | Nanyang Technological University |