Design of a tracking system for semiconductor equipment
The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5326 |
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| Institution: | Nanyang Technological University |
| Summary: | The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment. |
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