Design of a tracking system for semiconductor equipment
The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment.
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| Format: | Theses and Dissertations |
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2008
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| Online Access: | http://hdl.handle.net/10356/5326 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-53262023-03-11T17:14:20Z Design of a tracking system for semiconductor equipment Vijendran, M. Sivakumar School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment. Master of Science (Computer Integrated Manufacturing) 2008-09-17T10:47:54Z 2008-09-17T10:47:54Z 2001 2001 Thesis http://hdl.handle.net/10356/5326 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Manufacturing |
| spellingShingle |
DRNTU::Engineering::Manufacturing Vijendran, M. Design of a tracking system for semiconductor equipment |
| description |
The objective of this project work is to implement an Equipment Tracking System for Semiconductor Equipment that will track the real time Machine State of the equipment. |
| author2 |
Sivakumar |
| author_facet |
Sivakumar Vijendran, M. |
| format |
Theses and Dissertations |
| author |
Vijendran, M. |
| author_sort |
Vijendran, M. |
| title |
Design of a tracking system for semiconductor equipment |
| title_short |
Design of a tracking system for semiconductor equipment |
| title_full |
Design of a tracking system for semiconductor equipment |
| title_fullStr |
Design of a tracking system for semiconductor equipment |
| title_full_unstemmed |
Design of a tracking system for semiconductor equipment |
| title_sort |
design of a tracking system for semiconductor equipment |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5326 |
| _version_ |
1761781759835373568 |