Measurement of micro-channels with confocal microscopy
In this report a proficient method is suggested to measure the geometric dimensions of a micro channel merged by a transparent top plate by employing the techniques of swift vertical scan of featured surfaces, detailed multi-layer sampling of depth response curves (DRC), and measurement of the refra...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/53449 |
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| Institution: | Nanyang Technological University |
| Language: | English |