Development of high performance micromechanical resonators for advanced sensing applications
Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/5359 |
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| Institution: | Nanyang Technological University |