Development of high performance micromechanical resonators for advanced sensing applications

Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works.

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Bibliographic Details
Main Author:	Wang, Xiaowei
Other Authors:	Lin Rongming
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing
Online Access:	https://hdl.handle.net/10356/5359
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-53592023-03-11T18:07:12Z Development of high performance micromechanical resonators for advanced sensing applications Wang, Xiaowei Lin Rongming School of Mechanical and Aerospace Engineering Wang Zhe DRNTU::Engineering::Manufacturing Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works. DOCTOR OF PHILOSOPHY (MAE) 2008-09-17T10:48:44Z 2008-09-17T10:48:44Z 2005 2005 Thesis Wang, X. (2005). Development of high performance micromechanical resonators for advanced sensing applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/5359 10.32657/10356/5359 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Manufacturing Wang, Xiaowei Development of high performance micromechanical resonators for advanced sensing applications
description	Three types of micro-resonators using MEMS technology and relevant technical achievements have been realized and introduced in this works.
author2	Lin Rongming
author_facet	Lin Rongming Wang, Xiaowei
format	Theses and Dissertations
author	Wang, Xiaowei
author_sort	Wang, Xiaowei
title	Development of high performance micromechanical resonators for advanced sensing applications
title_short	Development of high performance micromechanical resonators for advanced sensing applications
title_full	Development of high performance micromechanical resonators for advanced sensing applications
title_fullStr	Development of high performance micromechanical resonators for advanced sensing applications
title_full_unstemmed	Development of high performance micromechanical resonators for advanced sensing applications
title_sort	development of high performance micromechanical resonators for advanced sensing applications
publishDate	2008
url	https://hdl.handle.net/10356/5359
_version_	1761782014174822400

Development of high performance micromechanical resonators for advanced sensing applications

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