Fabrication and testing of Micro Electro Mechanical Systems (MEMS) flow sensors

This report illustrates the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane pressure sensor for air flow and air direction applications. The LCP proves to be a material which is more sensitive and reliable when used in MEMS. Due to its physical and chemical pr...

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Bibliographic Details
Main Author: Yeo, Eric Gim Boon.
Other Authors: Miao Jianmin
Format: Final Year Project
Language:English
Published: 2013
Subjects:
Online Access:http://hdl.handle.net/10356/53975
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Institution: Nanyang Technological University
Language: English