Fabrication and testing of Micro Electro Mechanical Systems (MEMS) flow sensors

• Main Author: Yeo, Eric Gim Boon.
• Other Authors: Miao Jianmin
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/53975
• Institution: Nanyang Technological University

This report illustrates the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane pressure sensor for air flow and air direction applications. The LCP proves to be a material which is more sensitive and reliable when used in MEMS. Due to its physical and chemical pr...