Fabrication and testing of Micro Electro Mechanical Systems (MEMS) flow sensors

• المؤلف الرئيسي: Yeo, Eric Gim Boon.
• مؤلفون آخرون: Miao Jianmin
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Mechanical engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/53975

This report illustrates the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane pressure sensor for air flow and air direction applications. The LCP proves to be a material which is more sensitive and reliable when used in MEMS. Due to its physical and chemical pr...