Fabrication and testing of Micro Electro Mechanical Systems (MEMS) flow sensors

• 主要作者: Yeo, Eric Gim Boon.
• 其他作者: Miao Jianmin
• 格式: Final Year Project
• 語言: English
• 出版: 2013
• 主題: DRNTU::Engineering::Mechanical engineering
• 在線閱讀: http://hdl.handle.net/10356/53975

This report illustrates the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane pressure sensor for air flow and air direction applications. The LCP proves to be a material which is more sensitive and reliable when used in MEMS. Due to its physical and chemical pr...