Optical monitoring of time-dependent topographies in microfabrication

• Main Author: Leng, Yilong.
• Other Authors: Anand Krishna Asundi
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/54149
• Institution: Nanyang Technological University

The main aim of this project was to develop methodology using existing patented CDH system to monitor time-dependent topographies in microfabrication, particularly in wet chemical etching. To achieve this aim, an actual etch rate was predetermined through experiments and will be used as a reference...