Finite element analysis of temperature dependence of the piezoresistance of silicon

• Main Author: Wang, Zhao.
• Other Authors: Miao Jianmin
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/54158
• Institution: Nanyang Technological University

There is a widespread demand for high-temperature pressure sensors at temperatures above 200 °C and with high-frequency responses. PZT based devices owing to its excellent electrical and mechanical properties at rash environments, is a great candidate for use as an electromechanical sensor for high-...