Optimization of diffusion batch size based on real-time information
Diffusion is one of the operations that are run on batching basis in semiconductor fabrication. Due to its long processing time and being non-pre-emptive, operators and supervisors on the shop floor are frequently facing the dilemma that whether to launch the next batch promptly with availa...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2013
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| Online Access: | http://hdl.handle.net/10356/54719 |
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| Institution: | Nanyang Technological University |
| Language: | English |