Optimization of diffusion batch size based on real-time information
Diffusion is one of the operations that are run on batching basis in semiconductor fabrication. Due to its long processing time and being non-pre-emptive, operators and supervisors on the shop floor are frequently facing the dilemma that whether to launch the next batch promptly with availa...
Saved in:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Theses and Dissertations |
| 語言: | English |
| 出版: |
2013
|
| 主題: | |
| 在線閱讀: | http://hdl.handle.net/10356/54719 |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|