Micro EDM process

The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS...

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Bibliographic Details
Main Author: Chen, Yit Chien.
Other Authors: Gong, Thomas Haiqing
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5500
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Institution: Nanyang Technological University
Description
Summary:The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant.