Micro EDM process
The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS...
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2008
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| Online Access: | http://hdl.handle.net/10356/5500 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-55002023-03-11T17:07:51Z Micro EDM process Chen, Yit Chien. Gong, Thomas Haiqing School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing::Product engineering The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant. Master of Science (Mechanics & Processing of Materials) 2008-09-17T10:52:11Z 2008-09-17T10:52:11Z 2005 2005 Thesis http://hdl.handle.net/10356/5500 Nanyang Technological University application/pdf |
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Nanyang Technological University |
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NTU Library |
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Asia |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing::Product engineering |
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DRNTU::Engineering::Manufacturing::Product engineering Chen, Yit Chien. Micro EDM process |
| description |
The development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant. |
| author2 |
Gong, Thomas Haiqing |
| author_facet |
Gong, Thomas Haiqing Chen, Yit Chien. |
| format |
Theses and Dissertations |
| author |
Chen, Yit Chien. |
| author_sort |
Chen, Yit Chien. |
| title |
Micro EDM process |
| title_short |
Micro EDM process |
| title_full |
Micro EDM process |
| title_fullStr |
Micro EDM process |
| title_full_unstemmed |
Micro EDM process |
| title_sort |
micro edm process |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5500 |
| _version_ |
1761781551904849920 |