Femtosecond laser interaction with fused silica in surface structuring
Precision machining of micro holes and channels on glass has attracted great interest due to its high potential for the development of integrated micro-optics and biochip device in the MEMS industries. Yet, micromachining of glass remains a great challenge due to the extreme brittleness and hardness...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/55042 |
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| Institution: | Nanyang Technological University |
| Language: | English |