Femtosecond laser interaction with fused silica in surface structuring

Precision machining of micro holes and channels on glass has attracted great interest due to its high potential for the development of integrated micro-optics and biochip device in the MEMS industries. Yet, micromachining of glass remains a great challenge due to the extreme brittleness and hardness...

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Bibliographic Details
Main Author: Tan, Tong Tat
Other Authors: Zhou Wei
Format: Theses and Dissertations
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/55042
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Institution: Nanyang Technological University
Language: English
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